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    • 专利摘要:
    The invention relates to a laser device (1) arranged in and / or on III-V heterostructure and silicon comprising - an III-V heterostructure amplifier medium (3), and - an edge optical waveguide (11). ) disposed opposite the amplifying medium (3) and comprising a ribbon waveguide (15) having a longitudinal edge (17), the ridge optical waveguide (11) being disposed in silicon, two sampled Bragg gratings (RBE-A, RBE-B) formed in the ridge optical waveguide (11) and arranged on either side with respect to the III-V heterostructure amplifying medium (3), each sampled Bragg grating (RBE-A, RBE-B) comprising a first Bragg grating (RB1-A, RB1B) having a first pitch and formed in the ridge (17) and a second Bragg grating (RB2) -A, RB2-B) having a second pitch different from the first pitch and formed on the face (21) of the ribbon waveguide (15) opposite the edge (17).
    公开号:FR3043852A1
    申请号:FR1560911
    申请日:2015-11-13
    公开日:2017-05-19
    发明作者:Thomas Ferrotti；Bakir Badhise Ben；Alain Chantre；Sebastien Cremer；Helene Duprez
    申请人:Commissariat a lEnergie Atomique CEA；STMicroelectronics SA；STMicroelectronics Crolles 2 SAS；Commissariat a lEnergie Atomique et aux Energies Alternatives CEA；
    IPC主号:
    专利说明:

    Laser device and method of manufacturing such a laser device
    TECHNICAL AREA
    The present invention relates to the field of integrated photonic components that use both the properties of semiconductor materials capable of emitting light and those of semiconductor materials conventionally used in integrated circuits.
    More particularly, the present invention relates to a laser device and a method of manufacturing such a laser device.
    Such a laser device can be used to achieve optical links at high speeds, intrapuce links, intracards, free space.
    STATE OF THE PRIOR ART
    An important aspect of silicon photonics is the tunability of wavelength semiconductor lasers, particularly in their application in telecommunications in wavelength division multiplexing networks.
    Various solutions have been proposed, including the use of a DBR (Distributed Bragg Reflector) laser, namely a distributed Bragg reflector laser.
    By placing a heating element near the Bragg gratings and by precisely increasing the temperature at the Bragg gratings by applying a current to the heating elements, the refractive index of the silicon is modified by the temperature variation, which thus makes it possible to modify the output wavelength of such a laser in a certain range of wavelengths.
    However, the tunability range is often limited to less than 20nm, which is too limited. In addition, the output wavelength can only be changed to higher wavelengths (towards red), and not in the other direction. In addition, the heat dissipation of the heating elements is also a problem in terms of laser aging and power consumption.
    To overcome these problems, it has been proposed to equip DBR lasers with sampled Bragg gratings which is called SG-DBR (for "Sampled Grating - Distributed Bragg Reflector" in English, namely a distributed and networked Bragg reflector. sampled in French).
    In a sampled Bragg grating, a second network having a greater pitch than the first network is superimposed on a first Bragg grating. In this case, the pitch of the first Bragg grating defines the central output wavelength, while the pitch of the second Bragg grating adds additional reflection peaks. If a reflection peak of the first grating is in coincidence with a reflection peak of the second grating, the lower threshold will be obtained, which will therefore define the oscillation frequency of the laser.
    In an SG-DBR laser, if the refractive index or the pitch of one of the sampled Bragg gratings is changed, for example by application of a current for heating, it is possible, by Vernier effect, to blow the coincidence on one of the following reflection peaks which allows a hopping tunability in a wide range of wavelengths, in both directions, that is to say lower frequencies or higher frequencies. By changing the refractive index, for example by thermodynamic effect of the two Bragg gratings sampled simultaneously, fine continuous tunability is obtained. The tunability of this type of laser covers a range of more than 100 nm, which makes this type of laser of particular interest in the field of telecommunications, in particular for WDM wavelength division multiplexing technology.
    However, in SG-DBR lasers known from the state of the art, the first network and the second network of a sampled Bragg reflector are made by superposing on the same face in a semiconductor layer, which imposes constraints in the realization and limits the degrees of freedom in the design. In addition, this generally imposes longer and bulky sampled Bragg reflectors in order to obtain a high efficiency, particularly of the second network at a longer pitch than the first network.
    The present invention aims to overcome, at least partially, the aforementioned drawbacks by providing a laser device allowing a greater freedom of design and a smaller footprint while having a high reflectivity per unit length. For this purpose, the present invention proposes a laser device arranged in and / or on silicon and III-V hetero structure comprising an III-V heterostructure amplifying medium, and an optical ridge waveguide, arranged opposite the medium. amplifier and comprising a ribbon waveguide with a longitudinal edge, the ridge optical waveguide being disposed in silicon, two sampled Bragg gratings formed in the ridge optical waveguide and disposed on and further with respect to the III-V heterostructure amplifying medium, each sampled Bragg grating comprising a first Bragg grating having a first pitch and formed in the edge and a second Bragg grating having a second pitch different from the first step and formed on the face of the ribbon waveguide opposite the edge.
    In particular by physically de-correlating the two networks of a sampled Bragg reflector, it is possible to decouple the selectivity in length by Vernier effect. In addition, with regard to the reflectivity of the two Bragg gratings, increased reflectivity and thus a more efficient sampled Bragg reflector are obtained. This makes it possible to make SG-DBR lasers shorter and less cumbersome.
    The laser device may according to the invention comprise one or more of the following aspects taken alone or in combination:
    In one aspect, the ridge optical waveguide is oriented such that the ridge is disposed on the face of the ribbon waveguide distal to the amplifying medium.
    According to another aspect, the first pitch of the first Bragg gratings formed, in particular engraved, in the edge is larger than the second pitch of the second grating formed, in particular engraved, on the face of the ribbon waveguide opposite to the 'fish bone. For example, one of the sampled Bragg gratings has a length of between 700 μm and 10,000 pm, limits included and a reflectivity greater than 90%, and the other sampled Bragg grating has a length of between 300 μm and 600 μm, including limits and a reflectivity. between 30% and 80% limits included.
    In yet another aspect, the first Bragg gratings are formed by narrowed portions and wider portions of the ridge.
    The width of the ridge at the narrowed portions may be between 0% - 80% of the width of the wider portions of the ridge.
    In yet another aspect, the second Bragg gratings are formed only, in particular engraved, at the level of the first Bragg gratings at the location of the larger portions of the edge.
    According to an alternative, the second Bragg gratings are formed only, in particular engraved, at the level of the first Bragg gratings at the location of the narrowed portions of the edge.
    Furthermore, the transition between the narrowed portions and the widened portions defines transition flanks oriented for example perpendicular to the direction of propagation of the light.
    Alternatively, the transition between the narrowed portions and the enlarged portions defines transition flanks which are inclined with respect to a direction perpendicular to the direction of propagation of the light.
    The etching depth of the two networks of a sampled Bragg grating may be different.
    In particular, the etching depth of the first networks is greater than the etching depth of the second networks.
    The width of the second networks of sampled Bragg gratings is for example greater than that of the edge.
    It can be predicted that the width of the second gratings of the sampled Bragg gratings is substantially equal to the width of the ribbon waveguide.
    In yet another aspect, the ribbon waveguide and the longitudinal edge are each formed of crystalline silicon or one of crystalline silicon and the other of amorphous silicon. The longitudinal edge is for example of crystalline silicon and the ribbon waveguide is for example formed by two layers including that in contact with the longitudinal edge also crystalline silicon and the other proximal to the amorphous silicon amplifying medium . The invention also relates to a method for manufacturing a laser device, in particular as defined above, comprising the following steps: an edge waveguide is produced having a ribbon waveguide with an edge longitudinally in a silicon layer disposed above a buried insulating layer, itself arranged above a support substrate, etching is carried out on the edge of the first networks of sampled Bragg gratings, encapsulated by a first insulating layer the edge waveguide, we turn the assembly, we remove the support substrate and the first buried insulating layer to discover a face of the ribbon waveguide, it is made by etching the second networks of Bragg gratings sampled in the face of the ribbon waveguide, a second insulating layer is deposited and a chemical-mechanical polishing of the second insulating layer is carried out, a heterostructure formed of III-V semiconductor material is deposited, selective etching of the heterostructure is carried out to obtain an amplifying medium.
    BRIEF DESCRIPTION OF THE DRAWINGS Other advantages and characteristics will appear on reading the description of the invention, as well as the following figures in which: FIG. 1 shows a first embodiment of a laser device according to the invention according to a schematic view in longitudinal section, Figure 2 shows the laser device of Figure 1 in a schematic cross-sectional view along the section line II-II of Figure 1, Figure 3A shows a schematic perspective view of the guide of Edge wave of the laser device of Figure 1, Figure 3B shows a schematic representation in longitudinal section of the edge waveguide of the laser device of Figure 1, Figure 3C shows a schematic view from below of the guide of Edge wave of the laser device of Figure 1, Figure 4 shows a partial top view of the laser device of Figure 1, Figure 5 shows a side view. FIG. 6 shows a partial view from above of a third embodiment of the laser device according to the invention, FIG. 7 shows a partial view of the second embodiment of the laser device according to the invention. 4A shows a fifth embodiment of a laser device according to the invention in a schematic longitudinal sectional view, FIG. 8B shows a partial view of above the fifth embodiment of the laser device according to the invention, FIGS. 9A, 10A / 10B to 18A / 18B show schematic sectional views to illustrate a method of manufacturing a laser device according to the invention, the figures " A "being schematic views in longitudinal section while the figures" B "are corresponding views in cross section.
    DESCRIPTION OF EMBODIMENTS
    In all the figures, the identical elements bear the same reference numbers.
    The following achievements are examples. Although the description refers to one or more embodiments, this does not necessarily mean that each reference relates to the same embodiment, or that the features apply only to a single embodiment. Simple features of different embodiments may also be combined to provide other embodiments.
    In the description, it is possible to index certain elements or parameters, such as for example first element or second element as well as first parameter and second parameter, or first criterion and second criterion, and so on. In this case, it is a simple indexing to differentiate and name elements or parameters or criteria close but not identical. This indexing does not imply a priority of one element, parameter or criterion with respect to another, and it is easy to interchange such denominations without departing from the scope of the present description.
    In the present description, the term "longitudinal" should be understood substantially parallel to the direction of propagation of light (see arrow Fl) and the term "transverse" should be understood substantially transversely to the direction of propagation of light.
    "Not a Bragg network" means the length of a period of the Bragg network.
    When one indicates a range of wavelengths "limits included", it means that the limit values determining the range of wavelengths are also part of this range. Thus, for a range of wavelengths between 500nm and 600nm inclusive limits, the values of 500nm and 600nm are also part of the wavelength range.
    By convention, on an optical circuit realized in a given plane, it is defined polarization states TE (for "transverse electric" in English) and TM (for "transverse magnetic" in English) such as in the TE state the field The electric field is parallel to the plane of the circuit, while the magnetic field is perpendicular to the plane of the circuit, and in the state TM the magnetic field is parallel to the plane of the circuit while the electric field is perpendicular to the plane of the circuit. In fact, in the laser it will implicitly consider a state of quasi-TE polarization, ie the electric field is very predominantly polarized along its TE direction. Thus, the structure of the laser as described will preferentially allow coupling of the TE or quasi-TE mode of the wave.
    Figures 1 to 4 show a first embodiment of a laser device 1 according to the invention. In this embodiment, it is an SG-DBR laser device (for "Sampled Grading - Distributed Bragg Reflector" in English, namely a laser with Bragg reflectors distributed and with a French sampled network) integrated on silicon and with hetero III-V doped structure.
    FIG. 1 is a diagrammatic view in longitudinal section, FIG. 2 is a cross-sectional view along the section line II-II of FIG. 1. FIG. 3A shows a schematic perspective view of the edge waveguide of the device. Fig. 3B shows a schematic representation in longitudinal section of the ridge waveguide of the laser device 1 of Fig. 1. Fig. 3C shows a schematic bottom view of the ridge waveguide. of the laser device 1 of FIG. 1, and FIG. 4 shows a partial top view of the laser device 1.
    The laser device 1 comprises an optical amplification medium 3 with a III-V heterostructure, the heterostructure being arranged to generate photons, in other words an optical wave.
    Type III-V heterostructure means the use of materials which may be selected from the following non-exhaustive list: InP, GaAs, InGaAlAs, InGaAsP, AlGaAs, InAsP. The heterostructure of such an amplifying medium 3, also called a gain medium, may comprise a stack of various layers, for example a stack of layers forming quantum wells sandwiched between a first doped, preferably doped, layer 7. N, and a second doped layer 9, preferably P-doped.
    Typically, layer 9 will be P-doped in iO19 cm3 and N-doped layer 7 in iO18 cm3. More precisely, the layers 7 and 9 can themselves be formed by epitaxy and be composed of several sub-layers, with variable doping (the doping decreases when one approaches the quantum wells). Quantum wells are not doped.
    The first doped layer 7, when N-doped, may comprise a material chosen, for the most part, from InP, GaAs, InGaAsP, InGaAIAs, AIGaAs, InAsP. The second doped layer 9, when it is P-doped, may comprise a material chosen from InP, GaAs, InGaAsP, InGaAIAs. In other words, the materials used for the first layer 7 and the second layer 9 may be the same, only the doping changes.
    Of course, the doping can be reversed, that is to say that the first doped layer 7 can be P-doped, and the second doped layer 9 can be N-doped. The stack of layers 5 can comprise quantum wells or quantum boxes allowing the recombination of holes and electrons to form photons, and thus generating the optical wave at the amplifying medium 3. The elements (wells or boxes) quantum may include a material such as InP, GaAs, InGaAsP , InGaAIAs, AlGa, As, InAsP. The thickness of the hetero-structure amplifier medium 3 is typically of the order of several microns. The thickness of the quantum well stack 5 is of the order of 200-400 nm, for example 300 nm and the thickness of the layer 7 is of the order of 1000-200 nm. The layer 9 may have a thickness between I-3pm.
    As shown in FIGS. 1 and 2, under the amplifying medium 3 is disposed an optical waveguide II integrated or formed in a layer of silicon on insulator 13 (SOI in English for "Silicon on insulator").
    This edge waveguide 11 is arranged facing the amplifying medium 3 and consists of a ribbon waveguide 15 having a longitudinal edge 17 (see Figures 2 and 3A). The ribbon waveguide 15 and the longitudinal edge 17 are, for example, formed of crystal silicon both.
    However other options are possible. In particular, a first case is noted in which the ribbon waveguide 15 is of crystalline silicon and the longitudinal edge 17 is of amorphous silicon.
    According to a second particularly interesting case, the longitudinal edge 17 is made of crystalline silicon and the ribbon waveguide 15 is formed by two layers, one of which is in contact with the longitudinal ridge 17 also made of crystalline silicon and the other of which is proximal in the amplifying medium 3 in amorphous silicon, that is to say the layer which is closer to the amplifying medium 3. The longitudinal edge 17 and the crystalline silicon layer of the ribbon waveguide 15 are in the layer 13 silicon-on-insulator (SOI) while the amorphous silicon layer is in an insulating layer above the silicon-on-insulator layer. This arrangement makes it possible to maintain maximum compatibility with existing silicon face photonic processes and devices and to minimize the thermal budget applied to the amorphous silicon layer.
    Seen in section (FIG 2), the ribbon waveguide 15 and the longitudinal edge 17 are both rectangular, but their width, in particular of the edge 17, may vary in the direction of propagation of the light ( example in Fig. 3C and 4).
    More specifically, the ridge optical waveguide 11 is oriented so that the edge 17 is disposed on the face 23 of the ribbon waveguide 15 which is distal to the amplifying medium 3.
    The laser device 1 comprises two sampled Bragg gratings RBE-A and RBE-B arranged on either side with respect to the III-V heterostructure amplifier medium 3.
    Each sampled Bragg grating RBE-A, RBE-B comprises a first Bragg grating RB1-A respectively RB1-B having a first pitch and produced for example by etching in the edge 17 of the ridge optical waveguide 11 and a second Bragg grating RB2-A respectively RB2-B having a second pitch, different from the first pitch, and produced by etching on the face 21 of the ribbon waveguide 15 opposite to the edge 17. In particular, the pitch of the first Bragg grating RB1-A and RB1-B etched in the edge 17 is larger than the pitch of the second grating RB2-A and RB2-B etched on the face 21 of the opposite ribbon waveguide 15 on the ridge. The effective index in the case of a silicon network and for telecom wavelengths is between 3.3 and 3.7. The steps of the networks RB2-A and RB2-B are both equal to a value between 150 and 300 nm (between λ / 7 or λ / 6). The steps of networks RB1-A & RB1-B are not equal. They are such that a difference of their first peaks is of the order of nm (abs (AXl - Δλ2)) "lnm, Δλΐ being the difference of the first peaks of RB1-A and Δλ2 the difference of the peaks of RB1-B . These differences of the first peaks Δλΐ and Δλ2 are typically between 5nm and 20nm, resulting in a range of steps for RB1 networks ranging from 10pm to 40um. The group index ng is around 4 for silicon in the telecom wavelength range.
    As can be seen in particular in FIG. 3C, the edge 17 has at its two ends narrowed portions 24 and wider portions 28 in the transverse direction, thus forming the first Bragg gratings RB1-A and RB1-B .
    The width of the narrowed portions 24 is between 0% - 80% of the width of the wider portions 28 of the ridge 17.
    In this first embodiment, the transition between the narrowed portions 24 and the wider portions 28 defines transition flanks 30 oriented perpendicular to the direction of propagation of the light F1.
    The sampled Bragg grating RBE-B has a length of between 700 μm and 1000 μm, limits included and a reflectivity greater than 90%, and the other sampled Bragg grating RBE-A has a length of between 300 μm and 600 μm, limits included and reflectivity between 30% and 80% limits included. The lengths of the networks RB1-A and RB2-A respectively RB1-B and RB2-B are preferably equal, but they may in some cases be slightly different, especially if the length is not both a multiple of the steps of the networks RB1-A and RB2-A respectively RB1-B and RB2-B.
    For a better coupling, the central portion 26 of the edge 17 which is situated under the amplifying medium 3 also has a smaller width, in particular with respect to the portions 28, for example of the same width as that of the narrowed portions 24. portion 26 will typically be less than 800 nm. The longitudinal edge 17 disposed under the ribbon waveguide 15 (as shown in FIGS. 1 to 4) is distal to the amplifying medium 3. By "distal" is meant here that the ridge 17 is disposed on the face 23 opposite to the face 21: the face 23 is furthest from the amplifying medium 3.
    This is also clearly visible in FIG. 3A showing the edge waveguide 11 in isolation.
    As can be seen in FIG. 3A, the width Lb of the second Bragg gratings RB2-A and RB2-B is greater than the width La of the edge 17. In particular the width LB of the second Bragg gratings RB2-A and RB2-B is equal to the width of the ribbon waveguide 15.
    In addition, it is possible to choose the width LB of the networks of the second Bragg gratings RB2-A or RB2-B independently of the width LA of the edge as well as the first Bragg gratings RB1-A and RB1-B, without any influence. on the reflectivity of the second Bragg gratings RB2-A or RB2-B. The width LB of the networks of the second Bragg gratings RB2-A or RB2-B is chosen to be greater than ym.
    Figure 3B shows a schematic view in longitudinal section (in the direction of propagation of light) of the ridge guide 11 with the sampled Bragg gratings RBE-A and RBE-B.
    The height hA of the edge 17 is between 100 nm and 250 nm, in particular 200 nm.
    The height hR of the ribbon guide 15 is between 250 nm and 350 nm, in particular 300 nm.
    Referring now to Figure 4 showing a partial top view of the laser device of Figure 1.
    The second Bragg gratings RB2-A and RB2-B are shown in solid lines in the form of transverse lines, and the shape of the ridge 17 in the form of a dotted line.
    The central portion 26 of the edge 17 is under the cavity of the amplifying medium 3 represented by a square.
    Seen on the left of FIG. 4, there is seen the second Bragg grating RB2-B which is etched in the face 21 of the ribbon waveguide 15. The ridge 17 is widened in this portion where the second one is located. Bragg grating RB2-B and has the narrowed portions 24 spaced evenly and thus forming by structuring the edge 17 the first Bragg RB1-B grating.
    The first Bragg grating RB1-A or RB1-B is formed by the periodicity of the flanks 30 between the narrowed portions 24 and the enlarged portions 28. For example, a period PRB1B is defined in one or the other of the directions of propagation. by the distance between two flanks 30 of the same transition, for example widened towards narrow or vice versa.
    In FIG. 4, three narrowed portions 24 are shown to form the first Bragg grating RB1-B, but there may well be more narrowed portions disposed with a different periodicity.
    Due to the greater pitch of the first network RB1-B than that of the second Bragg grating RB2-B, additional reflection peaks are obtained for this sampled Bragg grating RBE-B.
    Seen on the right of Figure 4, there is a similar structure with a shorter sampled Bragg grating RBE-A for the output. It shows the second Bragg grating RB2-A which is etched in the face 21 of the ribbon waveguide 15. The edge 17 is widened in this portion where is located the second Bragg grating RB2-A and has a narrowed portion 24. But one can of course consider more narrowed portions 24.
    The width of the edge 17 at the narrowed portions 24 and at the central portion 26 is between 0.2pm and 0.8pm.
    The maximum width lmax of the edge 17 is greater than LA and less than 3pm
    Referring now to Figures 1 and 4. As seen in these figures, the laser device 1 further comprises an output network 27.
    This network 27 of coupling with an optical fiber 29 may comprise a trench network partially formed in the waveguide 11, for example by etching of the latter. Preferably, the trenches are substantially perpendicular to the longitudinal axis of the waveguide 11, and are formed on a lower face of the waveguide 11, the lower face 31 being in FIG. 1 the face of the waveguide 11 for the waveguide 11 according to the aforementioned dimensions, the trenches may have a depth of 125 nm or more if necessary. The network can, for example, be defined using a hard mask, then a directional engraving.
    Moreover, eutectic deposits 33 and 35 (FIG. 2) respectively deposited on the first doped layer 7 and the second doped layer 9 make it possible to take metal contacts on the layers 7 and 9.
    Because the first RB1-A, RB1-B and second RB2-A, RB2-B gratings of the sampled Bragg gratings RBE-A and RBE-B are arranged on opposite sides, the design of the laser device becomes more flexible. 1 and the losses are minimized, which makes it possible to have shorter sampled Bragg gratings and to produce less bulky laser devices 1.
    FIG. 5 shows in a view identical to that of FIG. 4 a second embodiment of the laser device 1 according to the invention.
    This embodiment differs from that of FIGS. 1 to 4 in that transition flanks 300 are inclined with respect to a direction perpendicular to the direction of propagation of the light, which makes it possible to ensure a less abrupt coupling. In this case the losses become negligible.
    FIG. 6 shows a third embodiment of the laser device 1 according to the invention.
    According to this mode the second Bragg grating RB2-A or RB2-B is etched only at the first Bragg grating RB1-A or RB1-B at the location of the wider portions 28 of the ridge 17. for the second network RB2-A or RB2-B a "oversampling" or a Bragg grating with phase jumps to further multiply the reflection peaks and give even more flexibility in the tunability of the laser device 1
    FIG. 7 shows a fourth embodiment of the laser device 1 according to the invention.
    This is an alternative embodiment of FIG. 6. In this embodiment the second Bragg grating RB2-A or RB2-B is etched only at the first Bragg grating RB1-A or RB1-A. B, at the location of the narrowed portions 24 of the ridge 17. This embodiment operates in a manner similar to that of Figure 6.
    Figures 8A and 8B show a fifth embodiment of the laser device according to the invention.
    This embodiment differs from that of Figures 1 to 4 in that the width of the edge 17 at the narrowed portions 24 is zero. To do this, for example, portions of the edge 17 are removed by etching.
    As a result, the etching depth of the second Bragg gratings RB2-A and RB2-B on one side and the first Bragg gratings RB1-A and RB1-B on the other side is different. In particular the etching depth of the first network RB1-A and RB1-B is greater than the etching depth of the second network RB2-A and RB2-B, which gives even more freedom in the design of such a device laser 1 according to the invention.
    With reference to FIGS. 9A, 10A / 10B to 19A / 19B, a method of manufacturing a laser device 1 according to the invention will now be described.
    FIGS. 9A, 10A / 10B to 18A / 18B show diagrammatic views in section, the figures "A" being diagrammatic views in longitudinal section while the figures "B" are corresponding views in cross section.
    As can be seen in FIG. 9A, the reference SB denotes a Silicon-on-Insulator (SOI) substrate of a wafer or wafer.
    This "SOI" substrate comprises a layer or film of silicon 100 having for example a thickness of between 200 nm and 500 nm typically of light and disposed above a buried insulating layer 102, commonly known as BOX (for "Buried OXide" in English). ). This buried insulating layer 102 is itself disposed above a support substrate 104.
    In a first step visible in FIGS. 10A and 10B, the silicon layer 100 is structured, for example by etching, to obtain an edge waveguide 11. If the laser device 1 is part of a functional assembly more importantly, other components (modulators, photodetectors, etc.) can be made during this step on the upper face 106 of the BOX layer 102.
    During this step, etching on the edge 11 or during the structuring of the silicon layer 100 of the first Bragg gratings RB1-A, RB1-B, is also carried out using the sampled Bragg gratings RBE-A, RBE-B .
    As seen in FIGS. 11A and 11B, an insulating layer 108, for example SiO 2, is deposited to encapsulate the ridge waveguide 11. Then a support substrate 110 is glued to the upper face 112 of FIG. the insulating layer 108.
    In the next step (FIGS. 12A and 12B), the assembly is turned over so that the edge 17 is directed downwards of the figure and the ribbon guide 15 is on top.
    Subsequently, the support substrate layer 104 is removed, for example by abrasion or mechanical-chemical polishing ("grinding"). The BOX layer 102 (which can serve as a polishing stop layer) is then at the top completely uncovered (see FIGS. 13A and 13B).
    The BOX 102 layer is then removed by selective wet chemistry or by dry etching, for example reactive ion etching ("RIE") or inductively coupled plasma etching ("ICP" for "inductively"). coupled plasma "in English) so as to discover the face 21 of the ribbon waveguide 15 which will be turned, as will be seen, to the amplifying medium 3 (see Figures 14A and 14B).
    In the next step (see FIGS. 15A and 15B), the second Bragg gratings RB2-A and RB2-B are etched (or structured) in the face 21 of the silicon layer 100 thus exposed, preferably over the entire width of the ribbon guide 15.
    According to a variant not shown, is deposited on the portion of the ribbon waveguide an additional layer of amorphous silicon and the second Bragg gratings are etched (or structured) in this additional layer of amorphous silicon. In this case, the longitudinal edge 17 is made of crystalline silicon and the ribbon waveguide 15 is formed by two layers, one of which is in contact with the longitudinal edge 17, also of crystalline silicon, the other of which is proximal to the middle. amplifier 3 in amorphous silicon. The longitudinal edge 17 and the crystalline silicon layer of the ribbon waveguide 15 are in the silicon-on-insulator (SOI) layer 13.
    This makes it possible to maintain maximum compatibility with existing silicon photonic processes and devices (for example modulators or photodetectors) and to minimize the thermal budget applied to the amorphous silicon layer.
    Then, in the case of the first as well as the second variant, an additional layer 116 of insulator, for example of SiO 2 of a hundred nm, is deposited on the entire face thus discovered (see FIGS. 16A and 16B). . This additional layer 116 can then be subjected to mechanical-chemical polishing.
    Then, for example, a wafer III-V 118 having on one face a ΠΙ-V heterostructure. Then, the wafer 118 is glued, for example by molecular bonding to the additional layer 116 (see FIGS. 17A and 17B), so that the heterostructure is in contact with the structure previously produced in the silicon.
    Finally, the selective etching of the substrate of the bonded wafer 118 is carried out so as to obtain the amplifying medium 3 (see FIGS. 18A and 18B). For the sake of simplification, the layers 9, 5 and 7 of the medium 3 have not been represented.
    We can then proceed to eutectic deposits, for example gold-based, so as to take metal contacts on the etched layers 120 and 122.
    Then, the assembly can be encapsulated by deposition of another insulating layer and metal contacts can be made conventionally.
    It is thus clear that the laser device 1 according to the invention can be manufactured without difficulties and allows a great freedom in its design to meet the greatest need of the market, including telecommunications.
    权利要求:
    Claims (17)
    [1" id="c-fr-0001]
    A laser device (1) disposed in and / or on III-V heterostructure and silicon comprising an III-V heterostructure amplifier medium (3), and an edge optical waveguide (11) disposed thereagainst of the amplifying medium (3) and comprising a ribbon waveguide (15) having a longitudinal edge (17), the ridge optical waveguide (11) being disposed in silicon, two sampled Bragg gratings (RBE-A, RBE-B) formed in the ridge optical waveguide (11) and arranged on either side with respect to the III-V heterostructure amplifying medium (3), each sampled Bragg grating ( RBE-A, RBE-B) comprising a first Bragg grating (RB1-A, RB1B) having a first pitch and formed in the ridge (17) and a second Bragg grating (RB2-A, RB2-B ) having a second pitch different from the first pitch and formed on the face (21) of the ribbon waveguide (15) opposite the edge (17).
    [2" id="c-fr-0002]
    2. Laser device according to claim 1, characterized in that the ridge optical waveguide (11) is oriented so that the edge (17) is disposed on the face (23) of the waveguide ribbon (15) which is distal to the amplifying medium (3).
    [3" id="c-fr-0003]
    3. Laser device according to claim 2, characterized in that the first step of the first Bragg gratings (RB1-A, RB1-B) formed in the edge (17) is larger than the second step of the second network (RB2 -A, RB2-B) formed on the face (21) of the ribbon waveguide (15) opposite the edge (17).
    [4" id="c-fr-0004]
    4. Laser device according to any one of claims 1 to 3, characterized in that one (RBE-B) sampled Bragg gratings has a length between 700pm and 1000Opm, inclusive limits and a reflectivity greater than 90% and in that the other sampled Bragg grating (RBE-A) has a length of between 300pm and 600pm inclusive and a reflectivity of between 30% and 80% inclusive.
    [5" id="c-fr-0005]
    5. Laser device according to any one of claims 1 to 4, characterized in that the first Bragg gratings (RB1-A, RB1-B) are formed by narrowed portions (24) and larger portions (28). of the ridge (17).
    [6" id="c-fr-0006]
    6. Laser device according to claim 5, characterized in that the width of the edge (17) at the level of the narrowed portions (24) is between 0% - 80% of the width of the wider portions (28) of the ridge (17).
    [7" id="c-fr-0007]
    Laser device according to Claim 5 or 6, characterized in that the second Bragg gratings (RB2-A, RB2-B) are formed solely at the level of the first Bragg gratings (RB1-A, RB1-B) at location of the wider portions (28) of the ridge (17).
    [8" id="c-fr-0008]
    8. Laser device according to claim 5 or 6, characterized in that the second Bragg gratings (RB2-A, RB2-B) are formed solely at the level of the first Bragg gratings (RB1-A, RB1-B) at the location of the narrowed portions (24) of the ridge (17).
    [9" id="c-fr-0009]
    9. Laser device according to any one of claims 5 to 8, characterized in that the transition between the narrowed portions (24) and the widened portions (28) defines transition flanks (30) oriented perpendicular to the direction of light propagation (Fl).
    [10" id="c-fr-0010]
    Laser device according to any one of claims 5 to 8, characterized in that the transition between the narrowed portions (24) and the widened portions (28) defines transition flanks (300) which are inclined with respect to a direction perpendicular to the direction of propagation of light (F1).
    [11" id="c-fr-0011]
    11. Laser device according to any one of claims 5 to 10, characterized in that the etching depth of the two networks RB ΙΑ, RB2-A; RB1-B, RB2-B) of a sampled Bragg grating (RBE-A; RBE-B) is different.
    [12" id="c-fr-0012]
    12. Laser device according to claim 3 and 11 taken together, characterized in that the etching depth of the first networks (RB1-A, RB1-B) is greater than the etching depth of the second networks (RB2-A, RB2 -B).
    [13" id="c-fr-0013]
    Laser device according to one of claims 1 to 12, characterized in that the width (LB) of the second gratings (RB2-A, RB2-B) of the sampled Bragg gratings (RBE-A; RBE-B) is greater than that of the ridge (17).
    [14" id="c-fr-0014]
    Laser device according to any one of claims 1 to 13, characterized in that the width (LB) of the second gratings (RB2-A, RB2-B) of the sampled Bragg gratings (RBE-A; RBE-B) is substantially equal to the width of the ribbon waveguide (15).
    [15" id="c-fr-0015]
    15. Laser device according to any one of claims 1 to 14 characterized in that the ribbon waveguide (15) and the longitudinal edge (17) are each formed of crystalline sibcium or one of crystalline silicon and the other in amorphous sibcium.
    [16" id="c-fr-0016]
    16. Laser device according to any one of claims 1 to 15, characterized in that the longitudinal edge (17) is of crystalline silicon and the ribbon waveguide (15) is formed by two layers including the one in contact with the longitudinal edge (17) also of crystalline silicon and the other of which is proximal to the amplifying medium (3) made of amorphous silicon.
    [17" id="c-fr-0017]
    A method of manufacturing a laser device according to any one of claims 1 to 16, comprising the steps of: providing a ridge waveguide (11) having a ribbon waveguide with a ridge longitudinally in a silicon layer (100) disposed above a buried insulating layer (102), itself disposed above a support substrate (104), is made by etching on the edge (11) of the first networks (RB1-A, RB1-B) sampled Bragg gratings (RBE-A, RBE-B), is encapsulated by a first insulating layer (110) the ridge waveguide (11), we return the assembly - the support substrate (104) and the first buried insulating layer (102) are removed until a face of the ribbon waveguide (15) is discovered, the second gratings (RB2) are etched -A, RB2-B) sampled Bragg gratings (RBE-A, RBE-B) in the face (21) of the ribbon waveguide (15) are deposited a second insulating layer (116) and a chemical-mechanical polishing of the second insulating layer; - a heterostructure (118) made of III-V semiconductor material is deposited; selective etching of the heterostructure (118) is carried out; to obtain an amplifying medium (3).
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    同族专利:
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    US9899800B2|2018-02-20|
    EP3168946A1|2017-05-17|
    EP3168946B1|2019-08-28|
    FR3043852B1|2017-12-22|
    US20170141541A1|2017-05-18|
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    法律状态:
    2016-11-30| PLFP| Fee payment|Year of fee payment: 2 |
    2017-05-19| PLSC| Publication of the preliminary search report|Effective date: 20170519 |
    2017-11-30| PLFP| Fee payment|Year of fee payment: 3 |
    2019-11-29| PLFP| Fee payment|Year of fee payment: 5 |
    2021-08-06| ST| Notification of lapse|Effective date: 20210705 |
    优先权:
    申请号 | 申请日 | 专利标题
    FR1560911A|FR3043852B1|2015-11-13|2015-11-13|LASER DEVICE AND METHOD FOR MANUFACTURING SUCH A LASER DEVICE|FR1560911A| FR3043852B1|2015-11-13|2015-11-13|LASER DEVICE AND METHOD FOR MANUFACTURING SUCH A LASER DEVICE|
    EP16197424.1A| EP3168946B1|2015-11-13|2016-11-04|Laser device and method for manufacturing such a laser device|
    US15/349,515| US9899800B2|2015-11-13|2016-11-11|Laser device and process for fabricating such a laser device|
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